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A cover letter is required for consideration for this position and should be attached as the first page of your resume. The cover letter should address your specific interest in the position and outline skills and experience that directly relate to this position.


This position will be primarily responsible for performing preventive, corrective, and diagnostic maintenance on photolithography, packaging, and inspection equipment in the Lurie Nanofabrication Facility. Primary equipment that fall under the responsibilities of this position are the GCA AS200 AutoStep, Heidelberg µPG 501 mask maker, Suss Microtec ACS 200 cluster tool, and Suss Microtec MA/BA6 mask/ bond aligner. This position will also require process recipe editing and development, monitor runs for verifying equipment performance, and writing/ updating of detailed equipment documentation. Assist users in conducting their research projects and running their processes; participate in training of new laboratory users. Participate in Emergency Response Team training sessions and responses. Assist with developing proper clean room safety protocols, standard practices, and discipline procedures.

Required Qualifications*

Bachelor’s degree in EE, ME, or an equivalent combination of education and experience. Two to four years of experience as an equipment engineer in a MEMS research or semiconductor fab. Typical knowledge base includes: operation of vacuum systems, control systems, process gas delivery, deposition and etch technologies, process development, and quality control. Preferred candidates will have a thorough understanding of semiconductor process technology with at least two years of demonstrated processing and metrology skills related to Photolithography and Packaging equipment. Demonstrated strong written and oral communication skills with the capacity to work and communicate effectively with a wide variety of constituents. Ability to work independently and as part of a team environment. Ability to work under pressure in a dynamic environment. Capability to routinely move sub-system components weighing up to 50lbs. The candidate is expected to complete and pass fit test and medical surveillance in order to participate in the Emergency Response Team.

Underfill Statement

This position may be underfilled at a lower classification depending on the qualifications of the selected candidate.

The actual title for the position (Engineer in Research Senior or Engineer in Research Intermediate) and compensation will be determined based upon the candidate’s level of education and experience.

Additional Information


The Lurie Nanofabrication Facility (LNF) at the University of Michigan is a 24/7 shared user facility available to research groups from government, industry and universities, currently serving ~500 users working on a wide variety of applications in engineering, physical and life sciences.

The LNF currently consists of a 13,500 SF class 10/100/1000/ 10000 cleanroom with a wide array of the technologies needed for developing and fabricating electronic, optoelectronic, MEMS and other devices. The laboratory includes equipment for thin film deposition and growth, optical and e-beam lithography, wet and dry etching, nano-imprinting, electrochemical deposition, chemical mechanical planarization, wafer bonding, wafer dicing, wire bonding, metrology, and more.

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The University of Michigan has a storied legacy of commitment to Diversity, Equity and Inclusion (DEI). The Michigan Engineering  component of the University’s comprehensive, five-year, DEI strategic plan—along with updates on our programs and resources dedicated to ensuring a welcoming, fair and inclusive environment—can be found at:

U-M EEO/AA Statement

The University of Michigan is an equal opportunity/affirmative action employer.